Saqua Single Wafer System
The Saqua series of 12-inch single-chip cleaners use a single wafer rotary wet cleaning technology. This equipment has technologies providing cleaning selectivity and high cleaning efficiency, including a chemical liquid protection system, pipeline anti-static system, and megasonic system. The residue is selectively cleaned without damaging the structure of the product itself.
Pinnacle™ Carrier-less Automated Wet Station
Designed for the most cutting-edge devices, the Pinnacle wet station utilizes the most advanced wafer handling to assure the best process results for manufacturers of integrated circuits, MEMS and advanced packaging.
The system inherits the company’s vast experience in designing advanced process equipment for more than 25 years and incorporates innovative handling capabilities required for 21st century device manufacturing.
GAMA™ Fully Automated Wet Station
The GAMA wet station series is a proven performer with hundreds of systems installed worldwide. A modular, flexible platform allows highly customized processes to meet the most demanding criteria. The system adapts to applications for both front-end-of-line and back-end-of-line process steps and accepts a wide variety of substrate materials. GAMA features closed loop process control to ensure consistent high quality to promote high yields for all wafer sizes.
V3™ Semi-automatic Wet Station
V3 is the next generation of Semi-Automatic wet benches targeted to meet the needs of Semiconductor and MEMS companies who need the process capability, recipe flexibility, equipment reliability, company support and knowledge to back up a successful installation of the product. The system is particularly well suited to R&D and process development and for low volume manufacturing.
Bcube Series Cleaning and Etching Wet Stations
The Bcube series of wet cleaning and etching equipment provides excellent process results for manufacturing MEMS, LEDs, and power semiconductors. Applicable processes include pre-cleaning, PR strip, RCA clean, pre-epi clean de-glue cleaning, pre- / post- diffusion cleaning, and various etching process steps.
Systems are available for a variety of substrate materials including Si, SiC, Germanium, Aluminum oxide and III-IV compound semiconductors.
Bpure Series Quartz Boat/Tube Cleaner
Bpure series quartz boat (tube) cleaning machine is widely used in integrated circuits, packaging, photovoltaic and other fields. The immersion treatment process is mainly used for the cleaning of quartz tubes / boats and silicon carbide tubes of diffusion and epitaxy equipment of 12 inches and below.
In addition, it can also be used to clean other quartz parts, such as quartz plates, ignition guns, insulated barrels, etc.
Dry Deposition/Diffusion/Etch Systems
NAURA Akrion is pleased to introduce to the microelectronics industries in North America and Europe, an expansive portfolio of front-end-of-line (FEOL) and back-end-of-line (BEOL) wafer processing tools.
The initial product line offering includes physical vapor deposition (PVD), chemical vapor deposition (CVD), Etch and Diffusion process equipment used in the production of micro-electro-mechanical systems (MEMS), compound semiconductor, power & silicon semiconductor devices produced on wafer substrates no larger than 200mm.
For more information, contact us through the “Contact Us” link.
GAMA-Solar Cell Processing
NAURA Akrion offers a full line of wet processing solutions to support the needs of solar cell manufacturers using crystalline silicon wafers. Our systems incorporate the technology and platforms that we have developed in 20 years of engineering over 1400 wet processing systems. We have taken this knowledge and developed equipment and process solutions specifically geared to the needs of solar cell manufacturers.
Legacy Equipment: Refurbished Systems, Updates and Product Enhancements
Extend capital funds – buy used or refurbished systems for big savings. Flexible solutions to meet your budget need ranging from installing equipment “as is” to…. fully refurbished, process qualified systems with one year parts and labor warranty.
The Velocity product is no longer available as a new process tool. Service and spare parts will be provided on a “best effort” basis. Consult your local area sales representative for more information
These systems are subject to availability.
| Velocity Single Wafer | AWP Wet Station | SCP Wet Station |
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