The Compact, Automated V3
V3 product design offers dry-to-dry processing, low exhaust requirements, few facility connections and easy maintenance access, while maintaining as much as a 20 percent footprint reduction over comparable tool sets.
The V3 robot is designed to handle solar silicon and 150 or 200mm wafers in standard cassettes for IC devices; alternate cassettes allow other materials to be processed using the standard robot arm. It is particularly well suited to MEMS cleaning and etching applications.
V3 Features:
- Small footprint batch-immersion system (S2/S8/FM/CE compliant) — dry-to-dry process
- 3 position, 2 axis rotary robot for accurate placement
- Interlocked pull-out electrical cabinet for easy access; full vertical access rear or front plumbing maintenance access
- Windows 2000 O/S, SECSII & GEM interface standard; ethernet based I/O & communication for reliable operation
- Graphical User Interface (GUI); automatic computer controlled operation
- Full scheduling; data-logging
Safety Features
- LED stack light with audible alarm
- Ergonomic color LCD monitor, keyboard & pointing device
- Interlocked automatic shield and easily accessed EMO/EPO buttons
- Advanced seismic bracing and rack-mounted components
- Easy reach distribution valving and plumbing accessibility
- Rear access leak detection
- UL 489 Rated Main Disconnect Switch
- FM 4910 Materials of Construction