Akrion GAMA FEOL Tools Will Ship To Fab In Europe

Akrion GAMA FEOL Tools Will Ship To Fab In Europe

Allentown, Pa., February 1, 2006 – Akrion, Inc. announced today that a repeat customer in the United Kingdom will purchase 2 GAMA Series tools for front-end-of-line (FEOL) cleaning.

The GAMA systems will begin shipping later this quarter. One of the wet stations will provide pre-diffusion cleaning, and the other, a combination tool, will be used for both resist strip and nitride etch applications. The GAMA system is a flexible, modular wet station adaptable to a wide variety of cleaning applications for semiconductor-related manufacturing.

Robust GAMA control software allows bi-directional processing which results in the capability to do more than one process with a single tool set. This lowers initial capital outlay and when combined with other features available with the GAMA system, such as ICE-1™ concentration control for extended bath life and the inherent low cost of consumables, results in a very low cost of ownership.

James S. Molinaro, Akrion President and CEO said, “We are one of the few cleaning system companies able to provide leading edge products for both single-wafer and batch-immersion applications. Our GAMA Series has withstood the test of time. The flexible technology built into the platform allows us to make enhancements to continue to provide reliable, high performance systems to companies that demand batch cleaning tools.”

About Akrion
Akrion is a leading provider of single-wafer and batch-immersion cleaning systems for the semiconductor industry. The company’s products are used in the production of a diverse range of semiconductor and related devices, including integrated circuits for DRAM, Flash, Logic and micro-electrical mechanical systems (MEMS) and photomasks. Headquartered in Allentown, Pa., Akrion’s Allentown production facility is ISO 9001:2000 and ISO 14001:2004 certified. The company Web site is located at https://na.zamolution.com.